Platinum Metals Rev., 1995, 39, (1), 32
A Palladium Source of Protons
The use of very bright gaseous sources for lithographic purposes has been suggested, but no practical ion sources have been found.
Now, however, researchers from the Muroran Institute of Technology in Japan, have made a preliminary proton ion source using palladium (T. Teraoka, H. Nakane and H. Adachi, Jpn. J. Appl. Phys., Part 2 Lett., 1994, 33, (8A), L1110-L1112), making use of the fact that palladium has the highest hydrogen permeability of all metals. The needle-shaped palladium allows hydrogen diffusion at the same rate as it permeates in bulk palladium. The ion source must be operated so as to avoid a phase transition which occurs at 100–200°C in the palladium. The ion source is expected to be useful for future microfabrication technology.